AM0111: Abatement of fluorinated greenhouse gases in semiconductor manufacturing --- Version 1.0.0

Submit comments for improvement of this methodology (please login)

Title Abatement of fluorinated greenhouse gases in semiconductor manufacturing (2392 KB)
Word version (990 KB)

Tools referenced in this methodology:

Version number
1.0.0
Scale Large scale
Status Active
Validity Valid from 23 Nov 12 onwards
Sectoral scope(s) 4, 9
Approval history NM0361

* Only the requests for clarification and revision that have been clarified by the Meth Panel are displayed. To view all requests for clarification, go to this page. To view all requests for revision, go to this page.