NM0361: Abatement of fluorinated compounds (FCs) from semiconductor manufacturing at UMC Singapore Branch.

Initial submission

Reference NM0361
Title Abatement of fluorinated compounds (FCs) from semiconductor manufacturing at UMC Singapore Branch.
Submitted by SGS on 02 Apr 12
Documents
Current status 28 Nov 12 - Submission approved
Historic statuses 02 Apr 12 - Submission received
 12 Apr 12 - Successfully passed the Completeness Check
 12 Apr 12 - Undergoing Assessment by the Secretariat
 10 May 12 - Submission fee received
 10 May 12 - Submission deemed qualified
 10 May 12 - Undergoing desk reviews by experts
 14 May 12 - Opened for public comments
 25 May 12 - Desk reviews completed by experts
 25 May 12 - Awaiting the Meth Panel recommendation
 29 May 12 - Closed for public comments
 22 Jun 12 - Awaiting Project Participant feedback on the preliminary recommendation
 03 Aug 12 - Clarifications received from project participants
 17 Aug 12 - Work in Progress (Meth Panel 57)
 12 Nov 12 - Meth Panel recommendation issued (A)

Project participants

  • Hua Chen

Call for public input

From 14 May 2012 (00:00:00 GMT) till 28 May 2012 (23:59:59 GMT).

Desk review(s)

Output of subsequent Panel meetings

Meth Panel 58
Meth Panel 57
Work in progress: Pls see para 7(c) of the report of MP57: The panel recommended the Board to take note that it could not conclude its consideration of NM0361 "Abatement of fluorinated compounds (FCs) from semiconductor manufacturing at UMC Singapore Branch" as additional information is required from the project participants to resolve the following issues: (i) conservative estimation of the baseline emissions by implementation of caps, and (ii) how to address situations in which non-FC specific systems were installed prior to the implementation of the project activity and/or required by local legislation.
Meth Panel 56

Output of subsequent EB meetings

EB 70 A (310 KB)