AM0096: CF4 emission reduction from installation of an abatement system in a semiconductor manufacturing facility --- Version 1.0.0

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Title CF4 emission reduction from installation of an abatement system in a semiconductor manufacturing facility (431 KB)
Word version (388 KB)

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Version number
1.0.0
Scale Large scale
Status Active
Validity Valid from 29 Sep 11 onwards
Sectoral scope(s) 4, 11
Approval history NM0332

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