14:11 09 Oct 24
AM0096:
CF4 emission reduction from installation of an abatement system in a semiconductor manufacturing facility --- Version 1.0.0
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Title |
CF4 emission reduction from installation of an abatement system in a semiconductor manufacturing facility (431 KB)
Word version (388 KB)
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Scale | Large scale | |
Status | Active | |
Validity | Valid from 29 Sep 11 onwards | |
Sectoral scope(s) | 4, 11 | |
Approval history | NM0332 |
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