04:37 15 Oct 24
AM0111:
Abatement of fluorinated greenhouse gases in semiconductor manufacturing --- Version 1.0.0
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Title |
Abatement of fluorinated greenhouse gases in semiconductor manufacturing (2392 KB)
Word version (990 KB)
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Scale | Large scale | |
Status | Active | |
Validity | Valid from 23 Nov 12 onwards | |
Sectoral scope(s) | 4, 9 | |
Approval history | NM0361 |
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