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Title	Substitution of PFC gases for cleaning Chemical Vapour Deposition (CVD) reactors in the semiconductor industry (663 KB) View AM0092 summary in the CDM Methodology Booklet Tools referenced in this methodology: Combined tool to identify the baseline scenario and demonstrate additionality (416 KB) Tool to determine the remaining lifetime of equipment (218 KB)
Version number	1.0.0
Scale	Large scale
Status	Not Active (old version)
Validity	Valid from 15 Jul 11 to 22 Nov 12
Sectoral scope(s)	4, 11
Approval history	NM0330
Clarifications*	Clarification of the application of equation 2 in the methodology (submitted 24 Sep 12): AM_CLA_0239 (166 KB)

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