NM0330: Substitution of Fluorinated Compound (FC) gases for cleaning Chemical Vapor Deposition (CVD) reactors in the semiconductor industry

Initial submission

Reference NM0330
Title Substitution of Fluorinated Compound (FC) gases for cleaning Chemical Vapor Deposition (CVD) reactors in the semiconductor industry
Submitted by DNV on 22 Dec 09
Documents
Current status 18 Jul 11 - Submission approved
Historic statuses 22 Dec 09 - Submission received
22 Dec 09 - Undergoing Assessment by the Secretariat
11 Jan 10 - Successfully passed the Completeness Check
24 Mar 10 - Submission fee received
24 Mar 10 - Submission deemed qualified
25 Mar 10 - Opened for public comments
18 Apr 10 - Closed for public comments
11 Nov 10 - Awaiting Project Participant feedback on the preliminary recommendation
21 Jan 11 - Clarifications received from project participants
11 Mar 11 - Work in Progress (Meth Panel 48)
06 May 11 - Work in Progress (Meth Panel 49)
11 Jul 11 - Meth Panel recommendation issued (A)

Project participants

  • Kevin James

Call for public input

From 25 Mar 2010 (00:00:00 GMT) till 17 Apr 2010 (23:59:59 GMT).

Desk review(s)

There are no desk reviews.

Output of subsequent Panel meetings

Meth Panel 50
Meth Panel 49
Work in progress: see para 1 (a) of MP49:10. The panel requested the Board to take note that it could not conclude its consideration of the following proposed new methodologies: (a) NM0330 ěSubstitution of Fluorinated Compound (FC) gases for cleaning Chemical Vapor Deposition (CVD) reactors in the semiconductor industryî, due to the high workload. The panel will continue its consideration of the proposed new methodology at its next meeting;
Meth Panel 48
Work in progress: MP49 report: 10. The panel requested the Board to take note that it could not conclude its consideration of the following proposed new methodologies: (a) NM0330 ěSubstitution of Fluorinated Compound (FC) gases for cleaning Chemical Vapor Deposition (CVD) reactors in the semiconductor industryî, due to the high workload. The panel will continue its consideration of the proposed new methodology at its next meeting;
Meth Panel 46

Output of subsequent EB meetings

EB 62 A (113 KB)