10:50 05 Dec 24
AM0078:
Point of Use Abatement Device to Reduce SF6 emissions in LCD Manufacturing Operations --- Version 2.0.0
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Title |
Point of Use Abatement Device to Reduce SF6 emissions in LCD Manufacturing Operations (542 KB)
Word version (2636 KB)
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Scale | Large scale | |
Status | Active | |
Validity | Valid from 02 Mar 12 onwards | |
Sectoral scope(s) | 4, 11 | |
Approval history | NM0271 | |
Previous Versions | ||
Title | Point of Use Abatement Device to Reduce SF6 emissions in LCD Manufacturing Operations --- Version 1 (522 KB) | |
Version number | 1.1 | |
Validity |
Valid from 12 Feb 09 to 01 Mar 12
Requests for registration can be submitted until 02 Nov 2012 23:59:59 GMT |
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Sectoral scope(s) | 4, 11 | |
Clarifications* | Clarification on the applicability and data requirement at the time of validation (submitted 27 Feb 09): AM_CLA_0145 (136 KB) | |
Approval history | NM0271 |
* Only the requests for clarification and revision that have been clarified by the Meth Panel are displayed. To view all requests for clarification, go to this page. To view all requests for revision, go to this page.
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