NM0335: PFC emission reduction by gas replacement in the process of CVD cleaning in semiconductor production

Initial submission

Reference	NM0335
Title	PFC emission reduction by gas replacement in the process of CVD cleaning in semiconductor production
Submitted	by KEA on 26 Feb 10
Documents	Scanned NM form (1537 KB) PDD - PDF version (1363 KB) New baseline and Monitoring Methodology - PDF version (681 KB)
Current status	06 Jun 11 - Submission not approved
Historic statuses	26 Feb 10 - Submission received 26 Feb 10 - Undergoing Assessment by the Secretariat 03 Mar 10 - Successfully passed the Completeness Check 24 Mar 10 - Submission fee received 24 Mar 10 - Submission deemed qualified 25 Mar 10 - Opened for public comments 18 Apr 10 - Closed for public comments 10 Aug 10 - Awaiting the Meth Panel recommendation 21 Mar 11 - Awaiting Project Participant feedback on the preliminary recommendation 12 Apr 11 - Clarifications received from project participants 23 May 11 - Meth Panel recommendation issued (C)

Project participants

• Seung jong Ko

Call for public input

From 25 Mar 2010 (00:00:00 GMT) till 17 Apr 2010 (23:59:59 GMT).

Desk review(s)

There are no desk reviews.

Output of subsequent Panel meetings

Meth Panel 49	Final recommendation (1084 KB) Summary recommendation (186 KB)
Meth Panel 48	Preliminary recommendation (889 KB) Feedback to preliminary recommendation (1252 KB)

Output of subsequent EB meetings

EB 61	C (120 KB)