Initial submission

Reference	NM0303
Title	PFC gas emissions reduction by gas replacement for CVD cleaning processes in semiconductor processing operations
Submitted	by KEA on 10 Apr 09
Documents	Project Design Document (874 KB) New Baseline and Monitoring Methodology (823 KB)
Current status	17 Feb 10 - Submission not approved
Historic statuses	10 Apr 09 - Submission received 21 Apr 09 - Successfully passed the Completeness Check 21 Apr 09 - Undergoing Assessment by the Secretariat 06 May 09 - Submission deemed qualified 06 May 09 - Undergoing desk reviews by experts 08 May 09 - Opened for public comments 30 May 09 - Closed for public comments 05 Jun 09 - Desk reviews completed by experts 05 Jun 09 - Awaiting the Meth Panel recommendation 06 Jul 09 - Awaiting Project Participant feedback on the preliminary recommendation 06 Oct 09 - Clarifications received from project participants 29 Jan 10 - Meth Panel recommendation issued (C) 29 Jan 10 - Awaiting EB decision

Call for public input

From 8 May 2009 (00:00:00 GMT) till 29 May 2009 (23:59:59 GMT).

• Sung Hwan Hong (45 KB)
• In Bae Lee (42 KB)

Desk review(s)

• Vinay Deodhar (142 KB)
• Markus Weber (150 KB)

Meth Panel recommendation and communication

EB decision