Initial submission

Reference	NM0289
Title	PFC gas emission reduction by gas replacement for CVD cleaning at 200mm (8 inches) process by Hynix Semiconductor Inc.
Submitted	by KEA on 17 Sep 08
Documents	Project Design Document (501 KB) New Baseline and Monitoring Methodology (363 KB)
Current status	18 Feb 09 - Submission not approved
Historic statuses	17 Sep 08 - Submission received 21 Oct 08 - Successfully passed the Completeness Check 21 Oct 08 - Undergoing Assessment by the Secretariat 12 Nov 08 - Submission rated 1 12 Nov 08 - Undergoing desk reviews by experts 19 Nov 08 - Opened for public comments 10 Dec 08 - Closed for public comments 16 Jan 09 - Desk reviews completed by experts 02 Feb 09 - Awaiting Project Participant feedback on the preliminary recommendation 02 Feb 09 - Meth Panel recommendation issued

Call for public input

From 19 Nov 2008 (00:00:00 GMT) till 10 Dec 2008 (23:59:59 GMT).

Desk review(s)

• Steve Thorne (162 KB)
• Arumugam Perumal (274 KB)

Meth Panel recommendation and communication

EB decision