AM0078: Point of Use Abatement Device to Reduce SF6 emissions in LCD Manufacturing Operations --- Version 2.0.0

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Title Point of Use Abatement Device to Reduce SF6 emissions in LCD Manufacturing Operations (542 KB)
Word version (2636 KB)

Tools referenced in this methodology:

Version number
2.0.0
Scale Large scale
Status Active
Validity Valid from 02 Mar 12 onwards
Sectoral scope(s) 4, 11
Approval history NM0271
Previous Versions
Title Point of Use Abatement Device to Reduce SF6 emissions in LCD Manufacturing Operations --- Version 1 (522 KB)
Version number 1.1
Validity Valid from 12 Feb 09 to 01 Mar 12
Requests for registration can be submitted until 02 Nov 2012 23:59:59 GMT
Sectoral scope(s) 4, 11
Clarifications* Clarification on the applicability and data requirement at the time of validation (submitted 27 Feb 09): AM_CLA_0145 (136 KB)
Approval history NM0271

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